%0 Journal Article
%@holdercode {isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S}
%@nexthigherunit 8JMKD3MGPCW/3ET2RFS
%@nexthigherunit 8JMKD3MGPCW/446B55B
%@archivingpolicy denypublisher allowfinaldraft
%@secondarymark B3_ASTRONOMIA_/_FÍSICA B1_ENGENHARIAS_II B1_ENGENHARIAS_III A2_INTERDISCIPLINAR
%@mirrorrepository sid.inpe.br/mtc-m19@80/2009/08.21.17.02.53
%D 2011
%4 sid.inpe.br/mtc-m19/2011/11.09.16.32
%T Biased Atmospheric, Sub-Atmospheric, and Low-Pressure Air Plasmas for Material Surface Improvements
%@usergroup administrator
%@usergroup valdirene
%V 39
%@affiliation Instituto Nacional de Pesquisas Espaciais (INPE)
%@affiliation Sao Paulo State Univ UNESP, Dept Chem & Phys, BR-12516410 Guaratingueta, SP, Brazil
%@affiliation Instituto Nacional de Pesquisas Espaciais (INPE)
%@affiliation Instituto Nacional de Pesquisas Espaciais (INPE)
%@affiliation Instituto Nacional de Pesquisas Espaciais (INPE)
%@affiliation Instituto Nacional de Pesquisas Espaciais (INPE)
%@resumeid 8JMKD3MGP5W/3C9JHSB
%@resumeid
%@resumeid 8JMKD3MGP5W/3C9JJ6L
%@versiontype publisher
%X This paper deals with some important aspects of recent research related to atmospheric, sub-atmospheric (SA), and low-pressure plasmas. It calls attention to the definition of the pressure ranges in which they are divided to avoid misconceptions in the literature. Pulsed bias applied to elements inside the plasma can lead to important effects such as ion implantation, nitriding, sputtering, heating, and diffusion, which can result in some of the effective applications in surface engineering such as plasma immersion ion implantation (PI3), plasma nitriding, magnetron sputtering, and so on. Electric fields are essential for the production of different types of plasma, either ac, dc, or pulsed ones, as seen in RF, self-sustained, glow, and high-voltage glow discharges, for example. The interrelation between the bias pulse, mean-free path, and Paschen law is examined, seeking for further improvement of processing of the material surface being used in many modern technologies. Results on PI3 in the low and near SA pressures, as well as their applications in metals, are also discussed.
%@area FISPLASMA
%@secondarykey INPE--PRE/
%@documentstage not transferred
%K aerospace industry, corrosion, friction, plasmas.
%@doi 10.1109/TPS.2011.2163089
%@issn 0093-3813
%@group LAP-CTE-INPE-MCT-BR
%@group
%@group LAP-CTE-INPE-MCT-BR
%@group SMF-ETE-INPE-MCT-BR
%@group LAP-CTE-INPE-MCT-BR
%@group LAP-CTE-INPE-MCT-BR
%N 10
%@dissemination WEBSCI; PORTALCAPES; COMPENDEX; IEEEXplore.
%P 1998-2005
%A Ueda, Mario,
%A Kostov, Konstantin Georgiev,
%A Oliveira, Rogerio de Moraes,
%A Savonov, Graziela da Silva,
%A Mello, Carina Barros,
%A Fernandes, Bruno Bacci,
%B IEEE Transactions on Plasma Science
%2 sid.inpe.br/mtc-m19/2011/11.09.16.32.01
%@secondarytype PRE PI