%0 Journal Article
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%3 influence of substrade.pdf
%X The influence of the substrate temperature on the formation of ultrananocrystalline diamond (UNCD) thin films, prepared by an argon-based hot filament chemical vapor deposition (HFCVD), is discussed in this work. The gas mixture used for diamond growth was 1 vol.% methane, 9 vol.% hydrogen and 90 vol.% argon at a total flow rate of 200 sccm and at a total pressure of 30 Torr. The substrate temperature range was from 550 to 850 °C at deposition time of 8 h. Mass growth rate was determined at different deposition temperatures. The activation energy for UNCD growth, determined from the Arrhenius plot, was lower (5.7 kcal/mol) than the values found for standard diamond deposition (around 11 kcal/mol). In this work, we suggest that the activation energy was lower because the growth of these films occurs at conditions that there is a high growth competition between diamond phase and sp2 phases. To support this hypothesis, systematic characterization studies based on Raman scattering spectroscopy, high-resolution X-ray diffractometry and high-resolution scanning electron microscopy were performed.
%@mirrorrepository sid.inpe.br/mtc-m19@80/2009/08.21.17.02.53
%8 Oct.
%N 10
%T Influence of substrate temperature on formation of ultrananocrystalline diamond films deposited by HFCVD argon-rich gas mixture
%@secondarytype PRE PI
%K Diamond, HFCVD, Activation energy, Growth kinetics, sp2 growth.
%@group LAS-CTE-INPE-MCT-BR
%@group
%@group
%@group LAS-CTE-INPE-MCT-BR
%@group LAS-CTE-INPE-MCT-BR
%@group LAS-CTE-INPE-MCT-BR
%@secondarykey INPE--PRE/
%@secondarymark B2_ASTRONOMIA_/_FÍSICA A1_ENGENHARIAS_II A1_ENGENHARIAS_III B2_ENGENHARIAS_IV A1_MATERIAIS
%@issn 0925-9635
%2 sid.inpe.br/mtc-m19@80/2009/12.10.13.17.56
%@affiliation Instituto Nacional de Pesquisas Espaciais (INPE)
%@affiliation Ceramics Glass Engineering Department, University of Aveiro
%@affiliation Ceramics Glass Engineering Department, University of Aveiro
%@affiliation Instituto Nacional de Pesquisas Espaciais (INPE)
%@affiliation Instituto Nacional de Pesquisas Espaciais (INPE)
%@affiliation Instituto Nacional de Pesquisas Espaciais (INPE)
%B Diamond and Related Materials
%P 1283-1288
%4 sid.inpe.br/mtc-m19@80/2009/12.10.13.17
%D 2009
%V 18
%@doi 10.1016/j.diamond.2009.05.002
%A Barbosa, Divani Carvalho,
%A Almeida, F. A.,
%A Silva, R. F.,
%A Ferreira, Neidenêi Gomes,
%A Trava-Airoldi, Vladimir Jesus,
%A Corat, Evaldo José,
%@dissemination WEBSCI; PORTALCAPES; COMPENDEX.
%@area FISMAT