%0 Journal Article
%@holdercode {isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S}
%@nexthigherunit 8JMKD3MGPCW/3ESR3H2
%@archivingpolicy denypublisher denyfinaldraft24
%@usergroup administrator
%@usergroup simone
%3 oxygen plasma.pdf
%X Diamond-like carbon (DLC) film as a solid lubricant coating represents an important area of investigation related to space devices. The environment for such devices involves high vacuum and high concentration of atomic oxygen. The purpose of this paper is to study the behavior of silver-incorporated DLC thin films against oxygen plasma etching. Silver nanoparticles were produced through an electrochemical process and incorporated into DLC bulk during the deposition process using plasma enhanced chemical vapor deposition technique. The presence of silver does not affect significantly DLC quality and reduces by more than 50% the oxygen plasma etching. Our results demonstrated that silver nanoparticles protect DLC films against etching process, which may increase their lifetime in low earth orbit environment.
%@mirrorrepository sid.inpe.br/mtc-m19@80/2009/08.21.17.02.53
%8 Aug.
%N 19
%T Oxygen plasma etching of silver-incorporated diamond-like carbon films
%@secondarytype PRE PI
%K Diamond-like carbon, Silver nanoparticles, Reactive ion etching, Plasma enhanced chemical vapor deposition, Raman spectroscopy.
%@group LAS-CTE-INPE-MCT-BR
%@group
%@group
%@group
%@group LAS-CTE-INPE-MCT-BR
%@group LAS-CTE-INPE-MCT-BR
%@secondarykey INPE--PRE/
%@secondarymark B2_ASTRONOMIA_/_FÍSICA B2_BIOTECNOLOGIA B1_CIÊNCIAS_BIOLÓGICAS_I B2_CIÊNCIAS_BIOLÓGICAS_II A1_ENGENHARIAS_II A2_ENGENHARIAS_III B1_ENGENHARIAS_IV C_ENSINO_DE_CIÊNCIAS_E_MATEMATICA A1_INTERDISCIPLINAR B1_MATERIAIS B1_MEDICINA_II B2_QUÍMICA
%@issn 0040-6090
%2 sid.inpe.br/mtc-m19@80/2009/12.14.18.10.07
%@affiliation Instituto Nacional de Pesquisas Espaciais (INPE)
%@affiliation Clorovale Diamantes Indústria e Comércio Ltda
%@affiliation Instituto Tecnológico de Aeronáutica (ITA)
%@affiliation Instituto Tecnológico de Aeronáutica (ITA)
%@affiliation Instituto Nacional de Pesquisas Espaciais (INPE)
%@affiliation Instituto Nacional de Pesquisas Espaciais (INPE)
%B Thin Solid Films
%P 5739-5742
%4 sid.inpe.br/mtc-m19@80/2009/12.14.18.10
%D 2009
%V 517
%@doi 10.1016/j.tsf.2009.04.037
%A Marciano, Fernanda Roberta,
%A Bonetti, L. F.,
%A Pessoa, R. S.,
%A Massi, M.,
%A Santos, Lúcia Vieira,
%A Trava-Airoldi, Vladimir Jesus,
%@dissemination WEBSCI; PORTALCAPES.
%@area FISMAT