%0 Journal Article
%@holdercode {isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S}
%@nexthigherunit 8JMKD3MGPCW/3ET2RFS
%@resumeid 8JMKD3MGP5W/3C9JJ6L
%@resumeid
%@resumeid 8JMKD3MGP5W/3C9JHSB
%@archivingpolicy denypublisher denyfinaldraft24
%X The temperature of the substrate has strong influence on the diffusion coefficient of nitrogen ions during plasma immersion ion implantation (PIII) performed in metallic surfaces, which affect the ion implantation profiles and can lead to the formation of thick implanted layers. In order to heat conveniently a large spectrum of metals and metallic alloys in vacuum and in the presence of plasma, as mandatory for efficient PIII, it is necessary to count on a stable heat source, able to provide steady temperatures in the range of 200 °C to more than 1000 °C. This has been accomplished in the current experiment by means of a thermionic cathode composed of a rolled tantalum foil covered with (Ba,Sr,Ca)O. Work-function of this electron source is around 2.1 eV, which is much lower than 4.5 eV of typically used tungsten filament. Metallic samples studied, in this case, are the anode of the discharge itself, being polarized during the heating cycle by positive DC voltages in the 100800 V range. They are implanted with negative pulses up to 10 kV/300 Hz/40 µs.
%@mirrorrepository sid.inpe.br/mtc-m19@80/2009/08.21.17.02.53
%8 June
%N 18-19
%T A new high-temperature plasma immersion ion implantation system with electron heating
%@secondarytype PRE PI
%K Plasma immersion ion implantation, Oxide cathode, Ion diffusion.
%@usergroup administrator
%@usergroup marciana
%@usergroup simone
%@group LAP-CTE-INPE-MCT-BR
%@group LAP-CTE-INPE-MCT-BR
%@group LAP-CTE-INPE-MCT-BR
%@group LAP-CTE-INPE-MCT-BR
%3 a new high temperature.pdf
%@secondarykey INPE--PRE/
%@secondarymark B2_ASTRONOMIA_/_FÍSICA A1_ENGENHARIAS_II A2_ENGENHARIAS_III B1_ENGENHARIAS_IV A2_GEOCIÊNCIAS A1_INTERDISCIPLINAR A1_MATERIAIS B1_MEDICINA_II B2_QUÍMICA
%@issn 0257-8972
%2 sid.inpe.br/mtc-m19@80/2010/06.01.17.15.29
%@affiliation Instituto Nacional de Pesquisas Espaciais (INPE)
%@affiliation Instituto Nacional de Pesquisas Espaciais (INPE)
%@affiliation Instituto Nacional de Pesquisas Espaciais (INPE)
%@affiliation Instituto Nacional de Pesquisas Espaciais (INPE)
%B Surface and Coatings Technology
%P 3009-3012
%4 sid.inpe.br/mtc-m19@80/2010/06.01.17.15
%@documentstage not transferred
%D 2010
%V 204
%@doi 10.1016/j.surfcoat.2010.03.014
%O The Tenth International Workshop on Plasma-Based Ion Implantation and Deposition, São José dos Campos, SP, Brazil
%O 07-11 September 2009 Edited by Joaquim J. Barroso and Mario Ueda
%A Oliveira, Rogério de Moraes,
%A Gonçalves, José A. N.,
%A Ueda, Mário,
%A Rizzo, P. N.,
%@dissemination WEBSCI; PORTALCAPES.
%@area FISPLASMA